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Beside mechanisms
based on piezo-actuators, Micromega Dynamics has developed
innovative positioning mechanisms based on the magnetic
bearing technology. As compared to existing positioning
systems that use several positioning mechanism in series
(e.g. one rough and one fine positioning system), those mechanisms
fulfill the following requirements in only one stage:
- Fine positioning in the nanometer range,
- Long stroke linear displacement over tens of
millimeters,
- Bandwidth up to a few hundred hertz
- From 1 to 6 degree-of-freedom
- No friction, no wear, no backlash
- Improved perturbation rejection
With this kind of specifications, the magnetic bearing
mechanisms can address very stringent requirements for
applications where factors such as accuracy, stroke and
bandwidth are an issue;
- Optics, Photonics & Measuring Technology (image stabilization,
interferometry, mirror positioning),
- Precision Mechanics & Mechanical Engineering (as
an additional layer to smart structures to
compensate for structural deformation, micro-engraving systems),
- Semi-conductor & Microelectronics (nano-metrology, wafer & mask positioning,
alignment, micro-lithography, inspection systems),
- Life science, medicine & biology (scanning microscopy, gene manipulation, patch clamp).
Products
Applications
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