| |
| |
Operation
The mirror supporting frame is put into levitation using two magnetic
bearings. At the same time, this supporting frame is moved by a magnetic
actuator. The mirror displacement is monitored by a laser interferometer and a
dedicated controller drives the magnetic actuator in a closed-loop
configuration.
|
|
|
Specifications
|
| |
|
Stroke : 5 mm
Precision: 10 nmrms
Bandwidth : 100 Hz
|
| |
|
Benefits
The use of magnetic bearings as guiding elements and of a one-stage magnetic
actuator allows for long range, high precision and high bandwidth without wear.
Performances
Axial Positioning
The stroke is 5mm and the positioning precision is 12nmrms
over the full closed-loop bandwidth of 100 Hz. The latter is mainly limited by
the control structure interaction (CSI). Due to the saturation of the actuator,
the settling time of the step response (Figure 1) depends on the amplitude of
the command. In this configuration, the Optical Delay Line works in a
perturbation rejection mode and the achieved sensitivity to perturbation is -60dB
at 10 Hz (Figure 2).
Radial Guiding
The guiding system has an infinite
static stiffness, only limited by the force produced by the magnets. The guiding
error mainly depends on the sensor resolution (122 nm quantification steps) and
on the bandwidth of the control system (1500 Hz), the resulting guiding error is
about 100nmrms (Figure 3). The four pairs of magnetic bearings dissipate a total of 3.5 W. This comes both from the large
bias current (1.5A) required to have the necessary control force, and from the
static control current that compensates for the gravity. The use of permanent
magnets to generate the bias magnetic flux can drastically reduces the first,
while the second is not relevant for space application. Neglecting these static
currents (i.e. horizontal bearings), the power dissipation can be estimated at
60 mW (Figure 4).
|
|